About Us

Our Story

Founded in 1984, VIART has established itself as a leading provider of professional semiconductor equipment repair services. With over four decades of industry experience, our team of ASML-certified engineers delivers precise, OEM-standard solutions for critical systems including ASML robots, Nikon lasers, and various semiconductor controllers. We specialize in extending equipment lifespan through our proprietary overhaul processes while maintaining the fastest turnaround times in the industry, helping global fabs minimize production downtime and maximize operational efficiency.

Company History

2008

Key Milestones

Establishment of VIART (O-Chang)

Launch of Semiconductor Equipment Parts Repair Service

Official Registration as an H Corporation Supplier

Start of Second-hand Parts Sales

2009

Technology Development

Development of Network Digital Information Display

Development of Auto Mirror System

2010

Advanced Service & Product Development

RF Generator Repair

RF Matcher Repair

Development of Novellus Equipment IOC Controller

Development of SAG Protector

2011

Precision Equipment Repair Services

Baratron Gauge Repair

MFC (Mass Flow Controller) Repair

Turbo Pump Repair

2012

On-site & Specialized Repair Services

RPS Repair

ASML Zero Sensor Laser Repair

PCB Repair

Resident Repair Service at H Corporation Cheongju Factory

2013

System Development & Corporate Expansion

Development of TRACK System Pressure Monitoring

Development of SECS-II Protocol

Relocation of Headquarters to Yongin U-TOWER, Korea

2018

Specialized ASML Equipment Services

ASML SCARA Robot Overhaul

ASML HERB Laser Repair

2019

Expansion, Engineering & Certifications

Relocation of Headquarters to Sammi-dong, Osan

Clean Room Engineering

ASML Double Folder Robot Overhaul

ASML Shutter Repair

ASML Library Repair

ASML XYZ Manipulator Repair

Nikon Laser Repair

ISO 9001, 14001, 45001 Certifications

2020

High-Precision Equipment Repair Services

ASML Cable Slap Repair

ASML P-Driver Motor Repair

ASML Beam Measuring System Repair

Canon Index Repair

Nikon Stepper Motor Repair

Servo Motor Repair

2022

Semiconductor Second-hand Sales Expansion

Start of Semiconductor Second-hand Equipment Sales

Start of Semiconductor Second-hand Parts Sales

What We Offer

With four decades of semiconductor expertise, VIART provides comprehensive lifecycle services, leveraging its core competencies to maximize equipment performance.