Projects

Component Sag Protector

Normal Operation

Power is normally supplied to the Flow Switch.

Power Outage

The system monitors the power supplied from the equipment to the Flow Switch.When a power outage occurs, it continues supplying power to the Flow Switch until the preset Setting Time, while transmitting the Flow Switch’s signal to the equipment.
Once the Setting Time is reached, the power supply to the Flow Switch is cut off and signal transmission is stopped.

Power Restoration

Power is normally supplied to the Flow Switch, and the Flow Switch’s signal is transmitted to the equipment.

ASML Secuipment

ASML Equipment, Remote Recording & Control

  • Unified management of various manufacturers’ remote-control tools through SecuipSingle (Secuipment S/W)
  • Eliminates the need for third-party control programs
  • All users can access and utilize a unified real-time remote control list via server-based maintenance functions in SecuipSingle

Infrastructure ChangesOffice

  • Utilize SecuipSingle’s MultiView function via RCS room or large TV in the office
  • Monitor all key equipment requiring real-time observation on a single screen
  • Respond to issues immediately upon detection

Summary

  • ASML Main PC connecting to Secuipment (HW)
  • Real time remote control & Monitoring
  • 24 Hours screen recording & review, download
  • Multiple Secuipment central operation & control

Photo ESC Chuck

(Photo chuck/Vacuum Chuck)

ASML Photo chucks

Canon Photo chucks

Nikon Photo chucks

Technical capabilities

Inspection Report Sample

ASML 12” chuck NEW (Dry)

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