Services
Our Services
At VIART, we deliver trusted, efficient services that keep your business running smoothly.
Fast response, expert support, and global reach—always within your reach.
01.
Component Overhaul & Used Parts Sales
Refurbishment and sale of key semiconductor components for high quality and cost efficiency.
Core Components: MFC, BARATRON GAUGE, TURBO PUMP, RF GENERATOR, RF MATCHER, RPS
02.
Photo Parts Overhaul
Overhaul of lithography equipment parts to maintain precision and reliability.
Core Services: XYZ MANIPULATOR, LIBRARY, SHUTTER, RELAY AMP, HERB BOARD, PPD, ZERO SENSOR LASER, INDEX
03.
Nikon Stepper Refurbish &
Used Equipment Sales
Specialized refurbishment and sales of Nikon steppers, delivering optimal performance and cost-effective solutions.
Core Models: 204B, i8A, EX12, i12D, SF155, i10C
04.
Robot Overhaul: Hardware
Specialized robot hardware overhaul for high-precision motion control and reliable performance.
Core Systems & Test Modules:
- ROBOT Analysis System
- Servo Motor Setting System
- Robot Diagnosis System
- Pulse Tuning & Oscilloscope Testing
05.
Robot Overhaul: Software
Specialized robot control and motor tuning software for precise motion control and reliable performance.
Core Functions:
- Robot Analysis Control (multi-level menu & real-time monitoring)
- Motor Encoder Tuning (signal optimization)
- Speed / Torque / Rotation Tuning
- Step-by-step & Continuous Operation
- Flexible Position & Speed Adjustment
- Current, Torque, Velocity Monitoring
Refurbishment Services for AMAT, LAM & TEL Systems
Specialized in LK3
Extending tool lifetime and ensuring stable performance for AMAT, LAM, and TEL systems, with specialized expertise in LK3.
01
TEL
（Tokyo Electron）
Tactras
Vigus Nest
02
AMAT
（Applied Materials）
Centura DPS
Centura Enabler
03
LAM
（Lam Research）
2300
